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FLP 515 stainless steel fiber filters are designed for ALD (Atomic Layer Deposition) and CVD (Chemical Vapor Deposition), both of which are key processes in the manufacture of semiconductor devices. It is designed for filtration of low vapor pressure gases generated from a mixture of liquid chemical or solid sources. These high temperature vapours are generated in a direct liquid injection system, where the process utilizes a vaporization chamber or from a bubbler system using carrier gas.
Our FLP filters offer very low differential pressure with adequate filter media surface area to capture particles from migrating downstream. Also, the stainless steel filter media withstands the temperatures (up to 450°C) needed to keep the low pressure gases, precursor vapors and vaporized organometallics in the gas phase.
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UHP Products 
